Laboratory of Vacuum Technology Plus, LLC

Company Details

Operational Address : 4-4, Lane 4922, Zelenograd, Moscow, Russian Federatio

Business Type : Manufacturer

Location : Moscow, Russian Federatio

Year Established : 2013

Main Markets : Domestic Market 90.00% Eastern Europe 5.00% Western Europe 5.00%

Main Products : Vacuum Equipment,Magnetron Sputtering Source, Ion Beam Source, Electron Beam Gun, PVD Machine, Transformers,Heaters,Vacuum Heaters, Ion And Plasma Sources, Sputtering Sources, Machines,Vacuum Gauges, ,

Links : Russian Federation Electronic Components & Supplies, Russian Federation Active Components, Russian Federation Sensors,

Company Introduction

We develop vacuum equipment for coating deposition, technological devices, sensors and components. State-of-the-art technical concepts, high reliability and capacity, as well as reasonable prices and compact sizes are distinguishing features of our machines.

Company Information

Contact Person : Mr. Vassily Grigoriev

Department : Owner/Entrepreneur

Job Title : deputy director for science

Telephone :

Fax Number :

Address : 4-4, passage No. 4922

Zip/Post Code : 124460

Website : http://shop.e-beam.ru

Company Product

Digital vacuum gauge, reliable Platinum Pt Pirani sensor, ModBus, RS-485
,ICP RIE system Nika-2014 RF Plasma Etching; high rate SiO2 silica etching, silicon etching
Round Magnetron Sputtering Source, PVD, vacuum coating, hard coatings
Pirani Pt Platinum Thermoresistive Vacuum Sensor
Rectangular Magnetron Sputtering Source (length 250mm), vacuum coating, hard coatings, TiN, CrN
Linear Ion Beam Source (length 400mm), ion cleaning, etching, IBAD
,Linear Ion Beam Source (length 250mm), ion cleaning, etching, IBAD
,Linear Ion Beam Source (length 145mm), ion cleaning, etching, IBAD
,Rectangular Magnetron Sputtering Source (length 400mm), vacuum coating, hard coatings, TiN, CrN
PVD Magnetron Sputter Deposition Machine (metal and dielectric coating, ion beam etching)
Rectangular Vacuum Heater (length 400mm), vacuum heating for PVD technology, infrared heating
Automated RF Impedance Matching Network, RF tuning, 13.56 MHz
SOVA automatic recirculated water supply system
Nika-2012 IN Ion-Beam Sputtering Machine (IBS)
Resistive thermal evaporator
Cryogenic temperature converter for DT-670 sensor Modbus RTU RS-485
Substrates traveling and rotation systems
IBS-52 Circular Ion Beam Source
High current transformer for PVD thermal evaporation 1000Hz
Nika-2012 PVD Machine
Nika-2014 Plasmachemical Etching Machine (PE)
Nika-2012 PS Conductive Layers Deposition Machine (CLD)
Vacuum machine NIKA-2012-500 Magnetron Sputtering Enlarged
Nika-2013 RS Resistive Layers Deposition Machine (RLD)
Nika-2013 MO/MT Magnetron Sputtering/Etching Machine (MSME)
Nika 2013-500 series machines
Nika-2014 Plasmachemical Deposition Machine (PECVD)
Nika-2012 MO/MT Magnetron Sputtering/Etching Machine (MEMD)
Nika-2012 RS Resistive Layers Deposition Machine (RL)
Nika-2013 PS Conductive Layers Deposition Machine (CLD)
Power Supply Unit for Thermal Evaporator

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